The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2012
Filed:
Oct. 29, 2009
Yevgeniy Konstanitinovich Shmarev, Lagrangeville, NY (US);
Stanislav Y. Smirnov, Bethel, CT (US);
Irina I. Pozhinskaya, Fairfield, CT (US);
Yevgeniy Konstanitinovich Shmarev, Lagrangeville, NY (US);
Stanislav Y. Smirnov, Bethel, CT (US);
Irina I. Pozhinskaya, Fairfield, CT (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
A catadioptric optical system having a high numerical aperture operates in a wide spectral range. The catadioptric system includes a correcting plate and an optical system. The correcting plate conditions electromagnetic radiation to correct at least one aberration. The optical system reflects a first portion of the conditioned electromagnetic radiation, refracts a second portion of the conditioned electromagnetic radiation, and focuses the reflected first portion of the conditioned electromagnetic radiation onto a target portion of a substrate. The first portion of the electromagnetic radiation is not refracted by an optical element, allowing the catadioptric optical system to operate in a broad spectral range.