Song-Moon Suh

Title: Song-Moon Suh: Innovator in Particle Detection and Surface Machining

Introduction

Song-Moon Suh is a prominent inventor based in San Jose, CA, with a remarkable portfolio of 19 patents. His work primarily focuses on advanced technologies in particle detection and surface machining, showcasing innovative solutions that address critical challenges in these fields.

Latest Patents

Among his latest patents, one is titled "Detection of Surface Particles on Chamber Components with Carbon Dioxide." This invention outlines a distribution unit for particle detection that initiates a collection process to dislodge surface particles from an article's surface using a stream that includes carbon dioxide. After collecting the dislodged particles, it provides a measurement of their concentration, enabling a detailed analysis of the article's surface contamination levels.

Another significant patent by Suh is "Organic Contamination Free Surface Machining." This method involves machining a raw surface of a metal component to eliminate the first native oxide, creating an as-machined surface. Following this, operations are performed to ensure the finished surface is free from contamination by removing any subsequent native oxide. This process enhances the quality of metal components used in various applications.

Career Highlights

Song-Moon Suh is a valuable member of Applied Materials, Inc., where he contributes to the company's innovative projects in semiconductor manufacturing and related technologies. His expertise in particle detection and surface processing has significantly advanced the industry standards, making him a prominent figure in his field.

Collaborations

Throughout his career, Suh has collaborated with esteemed colleagues, including Glen T. Mori and Chang Ke. Their joint efforts have led to advancements in technology, reinforcing the importance of teamwork in the innovation process.

Conclusion

Song-Moon Suh's contributions to the fields of particle detection and surface machining demonstrate his commitment to innovation and excellence. With 19 patents to his name, his work continues to influence advancements within the industry and showcases the vital role inventors play in driving technological progress.