The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Jul. 18, 2014
Applied Materials, Inc., Santa Clara, CA (US);
Song-Moon Suh, Sunnyvale, CA (US);
Yuanhong Guo, Mountain View, CA (US);
Guangchi Xuan, Sunnyvale, CA (US);
Pulkit Agarwal, Santa Clara, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Disclosed herein are systems and methods for cleaning a ceramic article using a stream of solid carbon dioxide (CO) particles. A method includes flowing liquid COinto a spray nozzle, and directing a first stream of solid COparticles from the spray nozzle toward a ceramic article for a first time duration to clean the ceramic article. The liquid COis converted into the first stream of solid COparticles upon exiting the spray nozzle. The first stream of solid COparticles causes a layer of solid COto be formed on the ceramic article. After the layer of solid COhas sublimated, a second stream of solid COparticles is directed from the spray nozzle toward the ceramic article for at least one of the first time duration or a second time duration to further clean the ceramic article.