The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2023
Filed:
Apr. 27, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Yuanhong Guo, Mountain View, CA (US);
Sheng Michael Guo, San Mateo, CA (US);
Marek W Radko, San Jose, CA (US);
Steven Victor Sansoni, Livermore, CA (US);
Nagendra Madiwal, Cupertino, CA (US);
Matvey Farber, Redwood City, CA (US);
Pingping Gou, Foster City, CA (US);
Song-Moon Suh, San Jose, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Yuji Murayama, Los Gatos, CA (US);
Anurag Bansal, Fremont, CA (US);
Shaofeng Chen, Austin, TX (US);
Michael Kuchar, Georgetown, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes receiving a metal component including a raw surface that includes a metal base, a first native oxide disposed on the metal base, and hydrocarbons disposed on the metal base. The method further includes machining the raw surface of the metal component to remove the first native oxide and a first portion of the hydrocarbons from the metal base. The machining generates an as-machined surface of the metal component including the metal base without the first native oxide and without the first portion of the hydrocarbons. The method further includes performing a surface machining of the as-machined surface of the metal component to remove a second portion of the hydrocarbons. The method further includes surface treating the metal component to remove a third portion of the hydrocarbons. The method further includes performing a cleaning of the metal component and drying the metal component.