The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2024

Filed:

Jan. 13, 2023
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Yuanhong Guo, Mountain View, CA (US);

Sheng Michael Guo, San Mateo, CA (US);

Marek W. Radko, San Jose, CA (US);

Steven Victor Sansoni, Livermore, CA (US);

Nagendra Madiwal, Cupertino, CA (US);

Matvey Farber, Redwood City, CA (US);

Pingping Gou, Foster City, CA (US);

Song-Moon Suh, San Jose, CA (US);

Jeffrey C. Hudgens, San Francisco, CA (US);

Yuji Murayama, Los Gatos, CA (US);

Anurag Bansal, Fremont, CA (US);

Shaofeng Chen, Austin, TX (US);

Michael Kuchar, Georgetown, TX (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/04 (2006.01); B23C 3/00 (2006.01); C23C 14/58 (2006.01); C23F 1/16 (2006.01); C23F 1/20 (2006.01); C23F 17/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23F 17/00 (2013.01); B08B 3/04 (2013.01); B23C 3/00 (2013.01); C23C 14/5873 (2013.01); C23F 1/16 (2013.01); C23F 1/20 (2013.01); H01L 21/67184 (2013.01);
Abstract

A method includes machining a raw surface of a metal component to remove first native oxide from a metal base of the metal component to generate an as-machined surface of the metal component. A second native oxide is formed on the metal base of the as-machined surface of the metal component subsequent to the machining. The method further includes, subsequent to the machining, performing operations to generate a finished surface of the metal component. The operations include a surface machining of the as-machined surface of the metal component to remove the second native oxide.


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