The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2016
Filed:
Mar. 05, 2013
Applied Materials, Inc., Santa Clara, CA (US);
James Matthew Holden, San Jose, CA (US);
Song-Moon Suh, San Jose, CA (US);
Todd Egan, Fremont, CA (US);
Kalyanjit Ghosh, San Jose, CA (US);
Leon Volfovski, Pacifica, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Richard Giljum, Brentwood, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
A substrate cleaning apparatus may include a substrate support having a support surface to support a substrate to be cleaned, wherein the substrate support is rotatable about a central axis normal to the support surface; a first nozzle to provide a first cleaning gas to a region of the inner volume corresponding to the position of an edge of the substrate when the substrate is supported by the support surface of the substrate support; a first annular body disposed opposite and spaced apart from the support surface of the substrate support by a gap, the first annular body having a central opening defined by an inner wall shaped to provide a reducing size of the gap between the first annular body and the support surface in a radially outward direction; and a first gas inlet to provide a first gas to the central opening of the first annular body.