Brentwood, CA, United States of America

Richard Giljum

USPTO Granted Patents = 7 

 

Average Co-Inventor Count = 5.4

ph-index = 2

Forward Citations = 107(Granted Patents)


Location History:

  • Milpitas, CA (US) (1999)
  • Brentwood, CA (US) (2015 - 2023)

Company Filing History:


Years Active: 1999-2023

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7 patents (USPTO):

Title: Richard Giljum: Innovator in Substrate Processing Technology

Introduction

Richard Giljum is a notable inventor based in Brentwood, CA (US). He has made significant contributions to the field of substrate processing, holding a total of 7 patents. His work focuses on enhancing the efficiency and effectiveness of substrate transfer mechanisms.

Latest Patents

Among his latest patents is a substrate transfer mechanism designed to reduce back-side substrate contact. This innovative substrate processing system includes a processing chamber with a susceptor that has a first surface and a second surface opposite to the first surface. A groove is formed in the first surface adjacent to its perimeter, and the substrate support structure features a plurality of carrier lift pins. Each of these lift pins is movably disposed in an opening that extends from the second surface to the first surface, with the opening recessed from the groove.

Career Highlights

Richard Giljum has established a successful career at Applied Materials, Inc., where he continues to develop cutting-edge technologies in substrate processing. His expertise and innovative mindset have positioned him as a key player in the industry.

Collaborations

Throughout his career, Richard has collaborated with talented individuals such as Michael Robert Rice and Masato Ishii. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies.

Conclusion

Richard Giljum's contributions to substrate processing technology exemplify the spirit of innovation. His patents and collaborative efforts continue to influence the industry positively.

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