The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Feb. 12, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Masato Ishii, Sunnyvale, CA (US);
Richard O. Collins, Santa Clara, CA (US);
Richard Giljum, Brentwood, CA (US);
Alexander Berger, Palo Alto, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/687 (2006.01); H01L 21/673 (2006.01); H01L 21/68 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67778 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/67115 (2013.01); H01L 21/67126 (2013.01); H01L 21/67196 (2013.01); H01L 21/67201 (2013.01); H01L 21/67248 (2013.01); H01L 21/67346 (2013.01); H01L 21/67748 (2013.01); H01L 21/67751 (2013.01); H01L 21/68 (2013.01); H01L 21/68707 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01); H01L 21/68757 (2013.01);
Abstract
A substrate processing system is disclosed which includes a substrate input/output chamber coupled to a transfer chamber, and one or more processing chambers coupled to the transfer chamber, wherein the substrate input/output chamber includes a plurality of stacked carrier holders, and a platen, wherein the platen includes a plurality of alignment pads and a plurality of openings formed in a recessed flange along a peripheral edge of the platen.