The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2015
Filed:
Aug. 09, 2012
Eric A. Englhardt, Palo Alto, CA (US);
Richard Giljum, Brentwood, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Igor G. Kogan, San Francisco, CA (US);
Michael Robert Rice, Pleasanton, CA (US);
Sushant S. Koshti, Sunnyvale, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Richard Giljum, Brentwood, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Igor G. Kogan, San Francisco, CA (US);
Michael Robert Rice, Pleasanton, CA (US);
Sushant S. Koshti, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.