Location History:
- Kawasaki, JP (1991 - 1999)
- Kanagawa-ken, JP (2001)
- Fujisawa, JP (2010)
- Kanagawa, JP (2009 - 2016)
- Seoul, KR (2016)
Company Filing History:
16 out of 716 
11 out of 52,711 
Years Active: 1991-2016
Title: **Shuichi Tamamushi: Innovator in Inspection and Beam Writing Technologies**
Introduction
Shuichi Tamamushi, based in Kanagawa, Japan, is an accomplished inventor, holding a remarkable total of 26 patents. His innovations have significantly contributed to advancements in inspection systems and charged particle beam writing technology, among other areas.
Latest Patents
Among his latest inventions is a sophisticated **inspection system and method for inspecting line width and/or positional errors of a pattern**. This method involves an intricate process for imaging an object, obtaining an optical image, and creating a reference image based on design pattern data. Tamamushi's system includes preparing an inspection recipe, checking patterns against templates, and detecting edges in both optical and reference images to acquire precise inspection values.
Additionally, Tamamushi has developed a **charged particle beam pattern writing method and a charged particle beam writing apparatus** that corrects beam rotation utilizing a correlation table. This innovative method measures position displacement of a stage in the direction of rotation while writing a beam image on a target object, thus ensuring accuracy and focus by using electrostatic lenses within magnetic fields of opposing electromagnetic lenses.
Career Highlights
Tamamushi has made significant contributions during his tenure at reputable companies such as Nuflare Technology, Inc. and Toshiba Corporation. His work in these organizations has established him as a pivotal figure in the development of advanced technologies in the fields of imaging and beam writing.
Collaborations
Throughout his career, Shuichi Tamamushi has collaborated with notable coworkers including Shusuke Yoshitake and Munehiro Ogasawara. These partnerships have facilitated the development of groundbreaking technologies that push the boundaries of what is possible in their respective fields.
Conclusion
With his impressive portfolio and continued innovation, Shuichi Tamamushi stands out as a key contributor to advancements in inspection and particle beam technologies. His dedication to innovation not only enhances industrial processes but also inspires future generations of inventors and engineers.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.