The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2016
Filed:
Mar. 23, 2015
Nuflare Technology, Inc., Yokohama, JP;
Takanao Touya, Kanagawa, JP;
Shuichi Tamamushi, Kanagawa, JP;
Hidenori Sato, Kanagawa, JP;
Hiroyuki Tanizaki, Mie, JP;
Takeshi Fujiwara, Kanagawa, JP;
Eiji Sawa, Kanagawa, JP;
Kentaro Okuda, Kanagawa, JP;
Hiroyuki Ikeda, Kanagawa, JP;
Hiromu Inoue, Kanagawa, JP;
Hiroshi Tsukada, Kanagawa, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
A method and system for imaging an object to be inspected and obtaining an optical image; creating a reference image from design pattern data; preparing an inspection recipe including one or more templates and parameter settings necessary for the inspection; checking the pattern and the template against each other, and selecting the reference image which corresponds to the template; detecting first and second edges in the selected reference image in accordance with the parameter setting using determined coordinates as a reference; detecting first and second edges in the optical image, this optical image corresponds to the selected reference image; and determining an inspection value by acquiring the difference between the line width of the optical image and the reference image using the first edge and second edge of the reference image and the first edge and second edges of the optical image.