Company Filing History:
Years Active: 2016-2025
Title: Innovations of Shruti Vivek Thombare
Introduction
Shruti Vivek Thombare is a prominent inventor based in Sunnyvale, California. She has made significant contributions to the field of semiconductor technology, holding a total of 13 patents. Her work focuses on advanced methods and systems that enhance the efficiency and effectiveness of alloy atomic layer deposition.
Latest Patents
One of her latest patents is titled "Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition." This invention features a showerhead design that includes multiple plenums and through holes, allowing for the precise delivery of metal precursors and reactants without intermixing. Another notable patent is related to "Molybdenum fill," which describes methods for filling features with molybdenum by controlling precursor flux to achieve desired fill characteristics.
Career Highlights
Shruti has established herself as a key figure at Lam Research Corporation, where she applies her expertise in semiconductor manufacturing. Her innovative approaches have contributed to advancements in the industry, making her a valuable asset to her company.
Collaborations
She has collaborated with notable colleagues, including Patrick A Van Cleemput and Michal Danek, to further enhance her research and development efforts.
Conclusion
Shruti Vivek Thombare's contributions to semiconductor technology through her patents and collaborative efforts highlight her role as an influential inventor in the field. Her work continues to drive innovation and improve manufacturing processes in the industry.