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For the Inventor, By the Inventor

Sunnyvale, CA, United States of America

Shruti Vivek Thombare

This inventor holds 15 USPTO granted patents and 17 published patent applications. Top assignee: Lam Research Corporation. Active years: 2016-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Shruti Vivek Thombare. Retrieved from https://idiyas.com/inventor/shruti-vivek-thombare

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 15 

% Patents Active = 93.3

Average Co-Inventor Count = 4.7

ph-index = 5

Forward Citations = 63(Granted Patents)


Company Filing History:

goldMedal15 out of 3,940 
 
Lam Research Corporation
 patents

Years Active: 2016-2026

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15 patents (USPTO):Explore Patents
1. 12588475 - High selectivity doped hardmask films (2026-03-24),
2. 12553131 - Deposition of molybdenum (2026-02-17),
3. 12331396 - Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition (2025-06-17),
4. 12327762 - Molybdenum fill (2025-06-10),
5. 12274047 - Line bending control for memory applications (2025-04-08),
6. 12203168 - Metal deposition (2025-01-21),
7. 12148623 - Deposition of tungsten on molybdenum templates (2024-11-19),
8. 12074029 - Molybdenum deposition (2024-08-27),
9. 11864372 - Line bending control for memory applications (2024-01-02),
10. 11827976 - Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition (2023-11-28),
11. 10777453 - Low resistivity films containing molybdenum (2020-09-15),
12. 10510590 - Low resistivity films containing molybdenum (2019-12-17),
13. 10229826 - Systems and methods for forming low resistivity metal contacts and interconnects by reducing and removing metallic oxide (2019-03-12),
14. 9478438 - Method and apparatus to deposit pure titanium thin film at low temperature using titanium tetraiodide precursor (2016-10-25),
15. 9478411 - [object Object] (2016-10-25),

Title: Innovations of Shruti Vivek Thombare

Introduction

Shruti Vivek Thombare is a prominent inventor based in Sunnyvale, California. She has made significant contributions to the field of semiconductor technology, holding a total of 13 patents. Her work focuses on advanced methods and systems that enhance the efficiency and effectiveness of alloy atomic layer deposition.

Latest Patents

One of her latest patents is titled "Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition." This invention features a showerhead design that includes multiple plenums and through holes, allowing for the precise delivery of metal precursors and reactants without intermixing. Another notable patent is related to "Molybdenum fill," which describes methods for filling features with molybdenum by controlling precursor flux to achieve desired fill characteristics.

Career Highlights

Shruti has established herself as a key figure at Lam Research Corporation, where she applies her expertise in semiconductor manufacturing. Her innovative approaches have contributed to advancements in the industry, making her a valuable asset to her company.

Collaborations

She has collaborated with notable colleagues, including Patrick A Van Cleemput and Michal Danek, to further enhance her research and development efforts.

Conclusion

Shruti Vivek Thombare's contributions to semiconductor technology through her patents and collaborative efforts highlight her role as an influential inventor in the field. Her work continues to drive innovation and improve manufacturing processes in the industry.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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