The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
May. 11, 2022
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Sonal Bhadauriya, Beaverton, OR (US);
Ragesh Puthenkovilakam, Portland, OR (US);
Kapu Sirish Reddy, Portland, OR (US);
Seshasayee Varadarajan, Lake Oswego, OR (US);
Shruti Vivek Thombare, Sunnyvale, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/033 (2006.01); C23C 16/06 (2006.01); H01J 37/32 (2006.01); C23C 16/505 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0332 (2013.01); H01J 37/32926 (2013.01); C23C 16/06 (2013.01); C23C 16/505 (2013.01); H01J 2237/3321 (2013.01);
Abstract
The present disclosure relates to high selectivity doped hardmask films, as well as methods of providing and using such films. In particular examples, the high selectivity doped hardmask film can be employed as a hardmask, an intermediate layer, or a coverage layer.