The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2026
Filed:
Apr. 11, 2022
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Shruti Vivek Thombare, Sunnyvale, CA (US);
Naveen Kumar Mahenderkar, San Jose, CA (US);
Lawrence Schloss, Palo Alto, CA (US);
Patrick A. Van Cleemput, Duvall, WA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/14 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C23C 16/14 (2013.01); C23C 16/45534 (2013.01);
Abstract
Provided herein are methods of depositing molybdenum (Mo) films. The methods involve depositing a thin layer of a molybdenum (Mo)-containing film such a molybdenum oxide, a molybdenum nitride, or a molybdenum oxynitride. The Mo-containing film is then converted to an elemental Mo film. A bulk Mo film may then be deposited on the elemental Mo film. In some embodiments, the process is performed at relatively low temperatures.