Location History:
- Nirasaki, JP (2004 - 2011)
- Amagasaki, JP (2010 - 2013)
- Sendai, JP (2015)
- Hyogo, JP (2015)
- Yamanashi, JP (2022)
Company Filing History:
Years Active: 2004-2022
Title: Shinya Nishimoto: Innovator in Plasma Processing Technology
Introduction
Shinya Nishimoto is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing, holding a total of 17 patents. His work focuses on developing advanced technologies that enhance the efficiency and effectiveness of plasma processing apparatuses.
Latest Patents
One of his notable inventions is a plasma processing apparatus designed for generating plasma in a processing space of a processing chamber. This apparatus includes an antenna that radiates microwaves for plasma generation into the processing chamber through a ceiling plate. Additionally, it features a pressing mechanism that presses the antenna against the ceiling plate using fluid pressure. Another significant invention is the plasma treatment device and optical monitor device. This optical monitor device is part of a microwave plasma etching device and includes a monitor head positioned radially inward of a semiconductor wafer, an optical waveguide for monitoring, and a monitor main body connected via an optical fiber.
Career Highlights
Shinya Nishimoto has worked with notable companies in the semiconductor industry, including Tokyo Electron Limited. His experience in these organizations has allowed him to refine his expertise in plasma processing technologies and contribute to innovative solutions in the field.
Collaborations
Throughout his career, Nishimoto has collaborated with talented individuals such as Hiroyuki Nakayama and Kouji Mitsuhashi. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Shinya Nishimoto's contributions to plasma processing technology have established him as a key figure in the field. His innovative patents and collaborations reflect his commitment to advancing technology and improving processes in the semiconductor industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.