The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Mar. 19, 2004
Shinya Nishimoto, Nirasaki, JP;
Kouji Mitsuhashi, Nirasaki, JP;
Hidehito Saigusa, Nirasaki, JP;
Taira Takase, Nirasaki, JP;
Hiroyuki Nakayama, Nirasaki, JP;
Shinya Nishimoto, Nirasaki, JP;
Kouji Mitsuhashi, Nirasaki, JP;
Hidehito Saigusa, Nirasaki, JP;
Taira Takase, Nirasaki, JP;
Hiroyuki Nakayama, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The present invention presents an improved optical window deposition shield for optical access to a process space in a plasma processing system through a deposition shield, wherein the design and fabrication of the optical window deposition shield advantageously provides an optically clean access to the processing plasma in the process space while sustaining substantially minimal erosion of the optical window deposition shield.