Company Filing History:
Years Active: 2004-2012
Title: Innovations by Hidehito Saigusa
Introduction
Hidehito Saigusa is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing systems, holding a total of 11 patents. His work focuses on improving the efficiency and effectiveness of plasma processing technologies.
Latest Patents
Saigusa's latest patents include a "Method and apparatus for an improved baffle plate in a plasma processing system." This invention presents an improved baffle plate that provides a uniform processing plasma in the process space while minimizing erosion of the baffle plate. Another notable patent is the "Apparatus for an improved deposition shield in a plasma processing system." This invention surrounds the process space with a deposition shield that ensures a clean processing plasma with minimal erosion.
Career Highlights
Saigusa is currently associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative designs and patents have contributed to advancements in plasma processing technologies, enhancing the performance of various systems.
Collaborations
Some of his notable coworkers include Kouji Mitsuhashi and Taira Takase, who have collaborated with him on various projects within the company.
Conclusion
Hidehito Saigusa's contributions to plasma processing systems through his patents and innovations have significantly impacted the industry. His work continues to pave the way for advancements in technology and efficiency in semiconductor manufacturing.