Average Co-Inventor Count = 4.23
ph-index = 8
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (11 from 10,326 patents)
11 patents:
1. 8117986 - Apparatus for an improved deposition shield in a plasma processing system
2. 8118936 - Method and apparatus for an improved baffle plate in a plasma processing system
3. 7811428 - Method and apparatus for an improved optical window deposition shield in a plasma processing system
4. 7678226 - Method and apparatus for an improved bellows shield in a plasma processing system
5. 7566368 - Method and apparatus for an improved upper electrode plate in a plasma processing system
6. 7204912 - Method and apparatus for an improved bellows shield in a plasma processing system
7. 7166166 - Method and apparatus for an improved baffle plate in a plasma processing system
8. 7166200 - Method and apparatus for an improved upper electrode plate in a plasma processing system
9. 7163585 - Method and apparatus for an improved optical window deposition shield in a plasma processing system
10. 7137353 - Method and apparatus for an improved deposition shield in a plasma processing system
11. 6798519 - Method and apparatus for an improved optical window deposition shield in a plasma processing system