The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2007
Filed:
Sep. 30, 2002
Applicants:
Hidehito Saigusa, Nirasaki, JP;
Taira Takase, Nirasaki, JP;
Kouji Mitsuhashi, Nirasaki, JP;
Hiroyuki Nakayama, Nirasaki, JP;
Inventors:
Hidehito Saigusa, Nirasaki, JP;
Taira Takase, Nirasaki, JP;
Kouji Mitsuhashi, Nirasaki, JP;
Hiroyuki Nakayama, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention presents an improved upper electrode for a plasma processing system, wherein the design and fabrication of an electrode plate coupled to an upper assembly advantageously provides gas injection of a process gas with substantially minimal erosion of the electrode plate.