The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2015
Filed:
Aug. 24, 2011
Toshihisa Nozawa, Sendai, JP;
Takahiro Senda, Sendai, JP;
Shinya Nishimoto, Sendai, JP;
Munetaka Yamagami, Tokyo, JP;
Kazuki Moyama, Sendai, JP;
Toshihisa Nozawa, Sendai, JP;
Takahiro Senda, Sendai, JP;
Shinya Nishimoto, Sendai, JP;
Munetaka Yamagami, Tokyo, JP;
Kazuki Moyama, Sendai, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An optical monitor device of the present microwave plasma etching device has: a monitor head located in a position more radially inward than the edge of a semiconductor wafer W mounted on a susceptor, more radially outward than a coaxial pipe, and above a cover plate; an optical waveguide for monitoring provided vertically below the monitor head, and longitudinally traversing the cooling plate, a dielectric plate, and a dielectric window; and a monitor main body optically connected to the monitor head via an optical fiber.