Shenjian Liu

This inventor holds 15 USPTO granted patents and 1 published patent application, primarily in Plasma Etching Technology. Top assignee: Lam Research Corporation. Active years: 2004-2016.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Shenjian Liu. Retrieved from https://idiyas.com/inventor/shenjian-liu

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank

USPTO Granted Patents = 15 (Patent Applications = 1)

% Patents Active = 73.3

Average Co-Inventor Count = 3.6

ph-index = 5

Forward Citations = 84(Granted Patents)

Location History:

Fremont, CA (US) (2004 - 2014)
San Ramon, CA (US) (2013 - 2016)

Company Filing History:

15 out of 3,955

Lam Research Corporation

patents

Years Active: 2004-2016

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Areas of Expertise:

Plasma Etching

Microloading Control

Yttrium Oxide

High-k Dielectric

Tungsten Silicide

Aluminum Etching

Phase Change Alloy

Noble Gas Plasma

Wet Processing

Etch Rate

Pattern Collapse

Residual Halogen

15 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9466502 - Line width roughness improvement with noble gas plasma (2016-10-11),

2. 9263284 - Line width roughness improvement with noble gas plasma (2016-02-16),

3. 8901004 - Plasma etch method to reduce micro-loading (2014-12-02),

4. 8753804 - Line width roughness improvement with noble gas plasma (2014-06-17),

5. 8609546 - Pulsed bias plasma process to control microloading (2013-12-17),

6. 8585844 - Extending lifetime of yttrium oxide as a plasma chamber material (2013-11-19),

7. 8518282 - Method of controlling etch microloading for a tungsten-containing layer (2013-08-27),

8. 8440573 - Method and apparatus for pattern collapse free wet processing of semiconductor devices (2013-05-14),

9. 8124538 - Selective etch of high-k dielectric material (2012-02-28),

10. 8097105 - Extending lifetime of yttrium oxide as a plasma chamber material (2012-01-17),

11. 7682979 - Phase change alloy etch (2010-03-23),

12. 7629255 - Method for reducing microloading in etching high aspect ratio structures (2009-12-08),

13. 7413992 - Tungsten silicide etch process with reduced etch rate micro-loading (2008-08-19),

14. 7208420 - Method for selectively etching an aluminum containing layer (2007-04-24),

15. 6774045 - Residual halogen reduction with microwave stripper (2004-08-10),

Title: Shenjian Liu: Pioneering Inventor from Fremont

Introduction: Shenjian Liu is a distinguished inventor based in Fremont, California, known for his groundbreaking contributions to various technological fields.

Latest Patents: Shenjian Liu holds several patents in the areas of artificial intelligence, renewable energy, and biotechnology, showcasing his versatility and innovative spirit.

Career Highlights: With a career spanning over two decades, Shenjian Liu has worked for leading tech companies, research institutions, and universities, where he has spearheaded numerous projects that have led to significant advancements in the industry.

Collaborations: Throughout his career, Shenjian Liu has collaborated with top researchers, engineers, and scientists from around the world, fostering a culture of innovation and knowledge sharing.

Conclusion: Shenjian Liu's passion for innovation, coupled with his relentless drive to push the boundaries of technology, has solidified his reputation as a visionary inventor in the ever-evolving landscape of inventions and patents.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

1 patent pending: