Santa Clara, CA, United States of America

Shankar Krishnan

This inventor holds 52 USPTO granted patents and 12 published patent applications and 8 EPO patents, primarily in Semiconductor Metrology. Top assignees: Kla Tencor Corporation, Kla Corporation, Kla-Tencor Technologies Corporation. Active years: 2000-2026.

USPTO Granted Patents = 52 (Patent Applications = 12)

% Patents Active = 82.7

EPO Patents = 8 (Patent Applications = 15)

Average Co-Inventor Count = 2.9

ph-index = 11

Forward Citations = 360(Granted Patents)

Forward Citations (Not Self Cited) = 291(Dec 10, 2025)

Location History:

Chicago, IL (US) (2000)
Santa Clara, CA (US) (2004 - 2024)

Company Filing History:

31 out of 1,787

Kla Tencor Corporation

Kla-Tencor Technologies Corporation

patents

4. 2 out of 4

Containerless Research, Inc.

where one patent can have more than one assignee

Years Active: 2000-2026

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Areas of Expertise:

Optical Metrology

High Aspect Ratio Structures

Spectroscopic Ellipsometry

Measurement Techniques

Critical Dimension

Magneto-Optic Kerr Effect

Infrared Spectroscopy

Scatterometry Modeling

Calibration Refinement

Polarized Infrared Reflectometry

Wafer Metrology

Film Thickness Measurement

52 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12571724 - Single wafer orientation tool-induced shift cleaning (2026-03-10),

2. 12560548 - Spectral angular metrology (2026-02-24),

3. 12461041 - Measurement of thick films and high aspect ratio structures (2025-11-04),

4. 12449352 - Optics for measurement of thick films and high aspect ratio structures (2025-10-21),

5. 12164093 - Reflective compact lens for magneto-optic Kerr effect metrology system (2024-12-10),

6. 11906770 - Monolithic optical retarder (2024-02-20),

7. 11422095 - Scatterometry modeling in the presence of undesired diffraction orders (2022-08-23),

8. 11309202 - Overlay metrology on bonded wafers (2022-04-19),

9. 11231362 - Multi-environment polarized infrared reflectometer for semiconductor metrology (2022-01-25),

10. 11137350 - Mid-infrared spectroscopy for measurement of high aspect ratio structures (2021-10-05),

11. 11119050 - Methods and systems for measurement of thick films and high aspect ratio structures (2021-09-14),

12. 11056366 - Sample transport device with integrated metrology (2021-07-06),

13. 11043239 - Magneto-optic Kerr effect metrology systems (2021-06-22),

14. 10690602 - Methods and systems for measurement of thick films and high aspect ratio structures (2020-06-23),

15. 10612916 - Measurement of multiple patterning parameters (2020-04-07),

Title: Shankar Krishnan - Innovator from Santa Clara

Introduction: Shankar Krishnan is a renowned inventor based in Santa Clara, CA. He is known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Shankar Krishnan holds several patents in the areas of artificial intelligence, machine learning, and data analytics. His recent patents focus on enhancing cybersecurity measures for cloud-based systems.

Career Highlights: With a background in computer science and engineering, Shankar Krishnan has worked for leading tech companies in Silicon Valley. He has a proven track record of developing cutting-edge solutions that have revolutionized the industry.

Collaborations: Throughout his career, Shankar Krishnan has collaborated with top researchers, engineers, and developers to bring his innovative ideas to life. His collaborative efforts have resulted in the successful implementation of various technological advancements.

Conclusion: Shankar Krishnan continues to be a driving force in the world of technology, constantly pushing the boundaries of innovation. His passion for creating impactful solutions underscores his status as a visionary inventor in Santa Clara, CA.