The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2021
Filed:
Mar. 17, 2020
Kla Corporation, Milpitas, CA (US);
Jun Wang, Shanghai, CN;
Yaolei Zheng, Shanghai, CN;
Chunxia Li, Shanghai, CN;
Changfei Yan, Shanghai, CN;
Lansheng Dong, Shanghai, CN;
Yang Zhou, Shanghai, CN;
Hai-Yang You, Shanghai, CN;
Haijing Peng, Shanghai, CN;
Jianou Shi, Palo Alto, CA (US);
Rui Ni, Shanghai, CN;
Shankar Krishnan, Santa Clara, CA (US);
David Y. Wang, Santa Clara, CA (US);
Walter H. Johnson, Rocklin, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A laser beam is directed through a transmissive axicon telescope or a reflective axicon telescope such as in a magneto-optic Kerr effect metrology system. With the transmissive axicon telescope, a Gaussian beam profile is directed through a first axicon lens and a second axicon lens. The first axicon lens and second axicon lens transfer the Gaussian beam profile of the laser beam to a hollowed laser ring. The laser beam with a hollowed laser ring can be directed through a Schwarzschild reflective objective. With the reflective axicon telescope, the laser beam is directed through two conical mirrors that are fully reflective. One of the conical mirrors defines a central hole that the laser beam passes through.