The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Oct. 19, 2021
Kla Corporation, Milpitas, CA (US);
Alex Zheng, Xuhui, CN;
Jun Wang, Shanghai, CN;
David Y. Wang, Santa Clara, CA (US);
Chunxia Li, Shanghai, CN;
Changfei Yan, Shanghai, CN;
Rui Ni, Shanghai, CN;
Lansheng Dong, Shanghai, CN;
Yang Zhou, Shanghai, CN;
Hai-Yang You, Shanghai, CN;
Haijing Peng, Shanghai, CN;
Walter H. Johnson, Rocklin, CA (US);
Shankar Krishnan, Santa Clara, CA (US);
Jianou Shi, Palo Alto, CA (US);
Abstract
A Cassegrain or quasi-Cassegrain structure objective lens is used in a polar MOKE metrology system. The quasi-Cassegrain reflective objective lens includes a primary concave mirror and a secondary mirror. The primary concave mirror has a wider diameter than the secondary mirror and defines an aperture through which the laser beam is configured to be transmitted toward the secondary mirror. The secondary mirror can be convex, concave, or have a flat surface.