The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2022
Filed:
Dec. 20, 2019
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Guorong V. Zhuang, San Jose, CA (US);
Shankar Krishnan, Santa Clara, CA (US);
David Y. Wang, Santa Clara, CA (US);
Xuefeng Liu, San Jose, CA (US);
Mengmeng Ye, Shanghai, CN;
Dawei Hu, Shanghai, CN;
Assignee:
KLA Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/55 (2014.01); G01N 21/35 (2014.01); G01N 21/21 (2006.01); G01N 21/3563 (2014.01);
U.S. Cl.
CPC ...
G01N 21/3563 (2013.01); G01N 21/211 (2013.01); G01N 21/55 (2013.01); G01N 2021/213 (2013.01); G01N 2021/3568 (2013.01); G01N 2021/3595 (2013.01);
Abstract
A system includes a light source, a Fourier transform infrared reflectometer (FTIR) spectrometer, and broadband reflectometer optics. The system is configured to measure polarized light and unpolarized reflectivities in a wavelength range from 2 μm to 20 μm. The light source can be a laser-driven light source. The spectroscopic reflectometer can include a single channel or two channels.