Company Filing History:
Years Active: 2019-2022
Title: Innovations and Contributions of Inventor Mengmeng Ye
Introduction
Mengmeng Ye is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor metrology, holding a total of 5 patents. His work focuses on advanced measurement techniques that enhance the accuracy and efficiency of semiconductor manufacturing processes.
Latest Patents
One of Mengmeng Ye's latest patents is the "Multi-environment polarized infrared reflectometer for semiconductor metrology." This innovative system includes a light source, a Fourier transform infrared reflectometer (FTIR) spectrometer, and broadband reflectometer optics. It is designed to measure both polarized light and unpolarized reflectivities across a wavelength range from 2 μm to 20 μm. The light source can be a laser-driven light source, and the spectroscopic reflectometer may feature either a single channel or two channels.
Another notable patent is the "Recipe optimization based zonal analysis." This patent provides metrology methods and modules that involve carrying out recipe setup procedures and/or metrology measurements using zonal analysis. This analysis relates to spatially variable values of setup parameters and/or metrology metrics across one or more wafers in one or more lots. The zonal analysis can utilize discrete or spatially continuous wafer zones to weight parameters and metrics during the setup and measurement processes.
Career Highlights
Mengmeng Ye has worked with notable companies in the semiconductor industry, including Kla Tencor Corporation and Kla Corporation. His experience in these organizations has allowed him to develop and refine his innovative approaches to metrology.
Collaborations
Mengmeng has collaborated with several professionals in his field, including Meng Cao and Lie-Quan Lee. These collaborations have contributed to the advancement of semiconductor measurement technologies.
Conclusion
Mengmeng Ye's contributions to semiconductor metrology through his patents and career experiences highlight his role as an influential inventor in the industry. His innovative solutions continue to shape the future of semiconductor manufacturing.