Location History:
- Santa Clara, CA (US) (2010 - 2016)
- San Jose, CA (US) (2015 - 2022)
Company Filing History:
Years Active: 2010-2022
Title: Guorong Vera Zhuang: Innovator in Semiconductor Metrology
Introduction
Guorong Vera Zhuang is a prominent inventor based in San Jose, CA (US). He has made significant contributions to the field of semiconductor metrology, holding a total of 18 patents. His innovative work focuses on advanced measurement techniques that enhance the accuracy and efficiency of semiconductor manufacturing processes.
Latest Patents
Zhuang's latest patents include a "Multi-environment polarized infrared reflectometer for semiconductor metrology." This system comprises a light source, a Fourier transform infrared reflectometer (FTIR) spectrometer, and broadband reflectometer optics. It is designed to measure both polarized light and unpolarized reflectivities across a wavelength range from 2 µm to 20 µm. The light source can be a laser-driven light source, and the spectroscopic reflectometer may feature one or two channels.
Another notable patent is for "Mid-infrared spectroscopy for measurement of high aspect ratio structures." This invention presents methods and systems for conducting high throughput spectroscopic measurements of semiconductor structures at mid-infrared wavelengths. The FTIR spectrometer in this patent includes multiple measurement channels that span a wavelength range between 2.5 micrometers and 12 micrometers. It is capable of measuring targets at various angles of incidence and polarization states, utilizing a laser sustained plasma (LSP) light source for enhanced brightness and precision.
Career Highlights
Throughout his career, Guorong Vera Zhuang has worked with notable companies such as Kla Tencor Corporation and Kla Corporation. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor metrology.
Collaborations
Zhuang has collaborated with esteemed colleagues, including Shankar Krishnan and David Y Wang. These partnerships have contributed to the advancement of his research and the successful development of his patented technologies.
Conclusion
Guorong Vera Zhuang is a distinguished inventor whose work in semiconductor metrology has led to significant advancements in the field. His innovative patents and collaborations reflect his commitment to enhancing measurement techniques in semiconductor manufacturing.