The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2016
Filed:
Jun. 29, 2012
Haiming Wang, Fremont, CA (US);
Guorong V. Zhuang, Santa Clara, CA (US);
Shankar Krishnan, Santa Clara, CA (US);
Klaus Flock, Mountainview, CA (US);
Johannes D. DE Veer, Menlo Park, CA (US);
Haiming Wang, Fremont, CA (US);
Guorong V. Zhuang, Santa Clara, CA (US);
Shankar Krishnan, Santa Clara, CA (US);
Klaus Flock, Mountainview, CA (US);
Johannes D. de Veer, Menlo Park, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
The present invention may include an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light reflected from the surface of the sample, a selectably configurable optical system comprising: a rotatable polarizing element disposed in the illumination arm of the optical system, an analyzing element disposed in the collection arm of the optical system, and a rotatable-translatable compensator element disposed in the collection arm of the optical system, and a control system communicatively configured to selectably configure the optical system in the a rotating compensator (RCSE) mode, a rotating polarizer (RPSE) mode, or a rotating polarizer and compensator (RPRC) mode.