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For the Inventor, By the Inventor

Dublin, CA, United States of America

Sangheon Lee

USPTO Granted Patents = 18

Average Co-Inventor Count = 5.3

ph-index = 6

Forward Citations = 349(Granted Patents)


Location History:

  • Milpitas, CA (US) (2007)
  • San Jose, CA (US) (2005 - 2009)
  • Sunnyvale, CA (US) (2006 - 2011)
  • Dublin, CA (US) (2011 - 2016)

Company Filing History:

goldMedal18 out of 3,768 
 
Lam Research Corporation
 patents

Years Active: 2005-2025

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18 patents (USPTO):
1. 12217972 - Multi-state pulsing for achieving a balance between bow control and mask selectivity (2025-02-04),
2. 9384979 - Apparatus for the deposition of a conformal film on a substrate and methods therefor (2016-07-05),
3. 8614149 - Critical dimension reduction and roughness control (2013-12-24),
4. 8357434 - Apparatus for the deposition of a conformal film on a substrate and methods therefor (2013-01-22),
5. 8268118 - Critical dimension reduction and roughness control (2012-09-18),
6. 7910489 - Infinitely selective photoresist mask etch (2011-03-22),
7. 7902073 - Glue layer for hydrofluorocarbon etch (2011-03-08),
8. 7695632 - Critical dimension reduction and roughness control (2010-04-13),
9. 7560388 - Self-aligned pitch reduction (2009-07-14),
10. 7541291 - Reduction of feature critical dimensions (2009-06-02),
11. 7442649 - Etch with photoresist mask (2008-10-28),
12. 7390749 - Self-aligned pitch reduction (2008-06-24),
13. 7294580 - Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition (2007-11-13),
14. 7250371 - Reduction of feature critical dimensions (2007-07-31),
15. 7192531 - In-situ plug fill (2007-03-20),

Title: Innovations of Sangheon Lee

Introduction

Sangheon Lee is a prominent inventor based in Dublin, CA, known for his significant contributions to the field of plasma processing technology. With a total of 18 patents to his name, he has made remarkable advancements that enhance the efficiency and effectiveness of various processes.

Latest Patents

One of his latest patents is titled "Multi-state pulsing for achieving a balance between bow control and mask selectivity." This innovative method involves generating a primary radio frequency (RF) signal that pulses among three states, allowing for improved control and selectivity in applications. Another notable patent is "Apparatus for the deposition of a conformal film on a substrate and methods therefor." This method describes a process for depositing a conformal film in a plasma processing chamber, utilizing a cooling apparatus to enhance the deposition quality.

Career Highlights

Sangheon Lee is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on developing advanced technologies that contribute to the efficiency of semiconductor manufacturing processes.

Collaborations

Throughout his career, Sangheon has collaborated with talented individuals such as S M Reza Sadjadi and Jisoo Kim, further enhancing the innovative capabilities of his projects.

Conclusion

Sangheon Lee's contributions to the field of plasma processing and his impressive portfolio of patents underscore his role as a leading inventor in the industry. His work continues to influence advancements in technology and manufacturing processes.

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