Location History:
- Kumamoto-ken, JP (2002 - 2005)
- Koshi, JP (2012 - 2018)
- Kumamoto, JP (2011 - 2020)
Company Filing History:
Years Active: 2002-2020
Title: Innovations by Inventor Ryoichi Uemura
Introduction
Ryoichi Uemura is a prominent inventor based in Kumamoto, Japan. With an impressive portfolio, he holds 10 patents, contributing significantly to advancements in coating processing technologies and substrate cleaning methods. His innovative spirit and dedication to research have earned him recognition in the field of engineering and technology.
Latest Patents
Among his latest patents, Uemura has developed a coating processing apparatus and a coating liquid collecting member. This apparatus includes a substrate holding part designed to rotate around a vertical axis, effectively distributing coating liquids. The design features a cup body that surrounds the substrate, with an annular exhaust path that aids in collecting scattering coating liquids. Additionally, the apparatus incorporates a solvent storage portion for optimizing the dissolution of collected coating liquid.
Another significant invention is the substrate cleaning method and apparatus, which introduces a systematic approach to cleaning wafers. This method features a series of steps, starting with the ejection of a cleaning liquid, followed by dry gas application to create a dry area. Uemura's method allows precise adjustments to be made if the intermediate area between wet and dry regions exceeds a defined threshold, enhancing cleaning efficiency.
Career Highlights
Uemura currently works at Tokyo Electron Limited, a renowned company known for its advanced semiconductor manufacturing equipment. His contributions at Tokyo Electron have been pivotal in pushing the boundaries of technology, paving the way for new innovations that impact various industries.
Collaborations
Throughout his career, Uemura has collaborated with esteemed colleagues, including Masahide Tadokoro and Shinichi Shinozuka. Together, they have propelled projects that not only improve existing technologies but also explore new avenues in research and development, underscoring the importance of teamwork in the innovation process.
Conclusion
Ryoichi Uemura exemplifies the spirit of innovation in the technology sector. His contributions through his patents and collaborative efforts demonstrate the significant impact that dedicated inventors can have on advancing industrial processes. As technology continues to evolve, Uemura's inventions will undoubtedly play a critical role in shaping the future of coating and cleaning processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.