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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10699919 B1

PDFFull Text
Date of Patent:
Jun. 30, 2020

Filed:

Aug. 24, 2018

Coating processing apparatus and coating liquid collecting member

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Ryoichi Uemura, Kumamoto, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Primary Examiner:

Yewebdar T Tadesse

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 51/00 (2006.01); B05B 14/30 (2018.01); B05C 11/02 (2006.01); H01L 21/673 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67023 (2013.01); B05B 14/30 (2018.02); B05C 11/02 (2013.01); H01L 21/6715 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01); H01L 21/67393 (2013.01); H01L 21/68764 (2013.01); H01L 51/0003 (2013.01);
Abstract

A coating processing apparatus includes: a substrate holding part for horizontally holding a substrate and configured to rotate around a vertical axis; a coating liquid supply part for supplying a coating liquid onto the substrate; a cup body surrounding the substrate; an annular exhaust path formed along a circumferential direction of the cup body between an inner peripheral surface of the cup body and an inner member installed inside the cup body; a coating liquid collecting member installed to cover the exhaust path and having an opening, and configured to collect the coating liquid scattering from the substrate; at least one solvent storage portion formed in the coating liquid collecting member and configured to store a first solvent for dissolving the coating liquid collected in the coating liquid collecting member; and a solvent supply part for supplying the first solvent to the at least one solvent storage portion.

Find Patent Forward Citations

Uemura, Ryoichi. (2020). Coating processing apparatus and coating liquid collecting member (U.S. Patent No. 10699919). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10699919

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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