Rodney Lee Robison

Title: Inventor Spotlight: Rodney Lee Robison

Introduction

Rodney Lee Robison, a talented inventor based in Mesa, AZ, has made significant contributions to the field of technology. With a robust portfolio of 17 patents, he has demonstrated a commitment to innovation and excellence in his work.

Latest Patents

Robison's latest patents reflect his expertise in advanced deposition techniques and fluid mixing systems. One notable patent is the "System for Backside Deposition of a Substrate," which details a process chamber designed for depositing thin films on the backside surfaces of wafers. This innovative approach aims to reduce wafer bowing and distortion, enhancing the quality of semiconductor manufacturing. The system features a substrate support with an annular perimeter seal, allowing the majority of the substrate backside to be exposed to a controlled process environment.

Another significant innovation by Robison is the "Point-of-Use Dynamic Concentration Delivery System with High Flow and High Uniformity." This method enables the mixing of liquid chemicals at varying ratios with exceptional uniformity and repeatability. The design includes multiple fluid supply lines that utilize elongate bladders to efficiently deliver specified volumes of process fluids, ensuring precision in chemical applications.

Career Highlights

Rodney Lee Robison currently contributes his expertise to Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His role involves developing cutting-edge technologies that push the boundaries of what is possible in the field. With a solid track record and numerous patents under his belt, Robison continues to play a crucial role in advancing innovations within his industry.

Collaborations

In his professional journey, Robison collaborates with esteemed coworkers such as Jozef Brcka and Ronald W Nasman. Together, they strive to develop groundbreaking solutions that enhance productivity and efficiency in semiconductor processes.

Conclusion

Rodney Lee Robison stands out as a prolific inventor whose contributions are shaping the future of semiconductor technology. His patents not only address current industry challenges but also pave the way for future advancements. As he continues to innovate at Tokyo Electron Limited, Robison's work will undoubtedly leave a lasting impact on the field.