The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
Sep. 04, 2019
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Ronald W. Nasman, Albany, NY (US);
Lior Huli, Albany, NY (US);
Anton deVilliers, Clifton Park, NY (US);
Rodney Robison, East Berne, NY (US);
Norman Jacobson, Albany, NY (US);
James Grootegoed, Albany, NY (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B01F 15/00 (2006.01); B01F 13/00 (2006.01); B01F 7/00 (2006.01); B01F 35/71 (2022.01); B01F 33/30 (2022.01); B01F 35/221 (2022.01); B01F 25/40 (2022.01);
U.S. Cl.
CPC ...
B01F 35/711 (2022.01); B01F 33/30 (2022.01); B01F 35/2211 (2022.01); B01F 25/40 (2022.01);
Abstract
A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer.