Ratsamee Limdulpaiboon

Title: Innovations of Ratsamee Limdulpaiboon

Introduction

Ratsamee Limdulpaiboon is a notable inventor based in San Jose, California. He holds a total of 13 patents, showcasing his significant contributions to the field of technology and materials science. His work primarily focuses on methods and systems that enhance the performance and durability of process chamber components.

Latest Patents

One of his latest patents is titled "Method of in situ ceramic coating deposition." This patent describes methods for in situ seasoning of process chamber components, such as electrodes. The method includes depositing a silicon oxide film over the process chamber component and converting it into a silicon-carbon-containing film. This protective film is resistant to plasma processing and dry etch cleaning, offering high density, good emissivity control, and reducing the risk of device property drift.

Another significant patent is related to "Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers." This invention focuses on altering film stress while enhancing etch selectivity. The method involves depositing one or more amorphous carbon hardmask layers onto the substrate and conducting a rapid thermal anneal operation lasting 60 seconds or less. The substrate is heated to an anneal temperature ranging from 600 degrees Celsius to 1,000 degrees Celsius, followed by etching the substrate.

Career Highlights

Ratsamee Limdulpaiboon has worked with prominent companies in the industry, including Applied Materials, Inc. and Intermolecular, Inc. His experience in these organizations has allowed him to develop innovative solutions that address complex challenges in semiconductor manufacturing and materials processing.

Collaborations

Throughout his career, Ratsamee has collaborated with talented individuals such as Chi-I Lang and Kwangduk Douglas Lee. These partnerships have contributed to the advancement of his research and the successful development of his patented technologies.

Conclusion

Ratsamee Limdulpaiboon's contributions to the field of technology through his patents and collaborations highlight his innovative spirit and dedication to improving process chamber components. His work continues to influence advancements in materials science and semiconductor manufacturing.