The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Apr. 16, 2014
Globalfoundries, Inc., Grand Cayman, KY;
Intermolecular, Inc., San Jose, CA (US);
Bongki Lee, Austin, TX (US);
Paul Besser, Sunnyvale, CA (US);
Kevin Kashefi, San Ramon, CA (US);
Olov Karlsson, San Jose, CA (US);
Ashish Bodke, San Jose, CA (US);
Ratsamee Limdulpaiboon, San Jose, CA (US);
Divya Pisharoty, Fremont, CA (US);
Nobi Fuchigami, Sunnyvale, CA (US);
GLOBALFOUNDRIES, INC., Grand Cayman, KY;
INTERMOLECULAR, INC., San Jose, CA (US);
Abstract
Integrated circuits and methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes forming an interlayer of dielectric oxide material in a FET region and overlying a semiconductor substrate. A high-K dielectric layer is deposited overlying the interlayer. Fluorine is incorporated into the interlayer and/or the high-K dielectric layer.