This inventor holds 20 USPTO granted patents and 2 published patent applications and 2 EPO patents, primarily in Wafer Processing Technology. Top assignees: Lam Research Ag, Sez Ag. Active years: 2006-2021.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Lind/Dr., AT (2006 - 2017)
- Lind im Drautel, AT (2017)
- Lind im Drautal, AT (2012 - 2019)
- Villach, AT (2018 - 2021)
Company Filing History:
Years Active: 2006-2021
Areas of Expertise:
Title: Innovations of Rainer Obweger: A Leader in Wafer Processing Technologies
Introduction
Rainer Obweger, an accomplished inventor based in Lind Im Drautal, Austria, has significantly contributed to the field of semiconductor manufacturing. With a remarkable portfolio of 20 patents, his creations focus on innovative methods and devices that enhance the processing of wafer-shaped articles.
Latest Patents
Rainer's latest patent revolves around a method and apparatus designed specifically for processing wafer-shaped articles. The device features a closed process chamber that ensures a gas-tight enclosure. Within this chamber, a rotary chuck holds the wafer-shaped article securely. A heater is strategically positioned to heat the article from one side without making physical contact, utilizing radiation with a maximum intensity in the wavelength range of 390 nm to 550 nm. Additionally, the design includes at least one liquid dispenser that applies a process liquid to the side of the article opposite to the heater, further enhancing the processing efficiency.
Career Highlights
Throughout his career, Rainer Obweger has been affiliated with notable companies in the semiconductor industry, including Lam Research AG and SEZ AG. His work has consistently pushed the boundaries of technology, leading to advancements that are integral to modern semiconductor manufacturing processes.
Collaborations
Rainer has worked alongside esteemed colleagues, including Thomas Wirnsberger and Andreas Gleissner. These collaborations have played a pivotal role in the development of his groundbreaking innovations, reflecting a team-oriented approach to tackling complex engineering challenges.
Conclusion
Rainer Obweger's contributions to wafer processing technology exemplify the spirit of innovation that drives the semiconductor industry forward. His patents not only demonstrate his expertise as an inventor but also signify advancements that pave the way for more efficient and effective manufacturing processes. With a strong foundation of collaboration and a clear vision for the future, Rainer continues to inspire the next generation of inventors in the field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile