The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2017
Filed:
Apr. 01, 2014
Harald Okorn-schmidt, Klagenfurt, AT;
Franz Kumning, Lieserbruecke, AT;
Rainer Obweger, Lind Im Drautal, AT;
Thomas Wirnsberger, Seeboden, AT;
Harald Okorn-Schmidt, Klagenfurt, AT;
Franz Kumning, Lieserbruecke, AT;
Rainer Obweger, Lind Im Drautal, AT;
Thomas Wirnsberger, Seeboden, AT;
Lam Research AG, Villach, AT;
Abstract
An apparatus for treating a surface of an article includes a chamber for receiving an article to be treated. A dispenser dispenses a treatment liquid including inorganic acid onto the article. A tank stores the treatment liquid. An ozone generator communicates with a supply line entering or exiting the tank to mix ozone with the treatment liquid. A cooler cools the treatment liquid to a subambient temperature in a range of 3° C. to less than 20° C. A heater heats a surface of an article to be treated to a temperature at least 30° C. greater than a temperature of the treatment liquid when applied to the article.