This inventor holds 2 USPTO granted patents. Top assignee: Lam Research Ag. Active years: 2014-2017.
Company Filing History:
Years Active: 2014-2017
Title: Franz Kumning: Innovator in Surface Treatment Technology
Introduction
Franz Kumning is a notable inventor based in Lieserbrücke, Austria. He has made significant contributions to the field of surface treatment technology, holding 2 patents that showcase his innovative approach to improving industrial processes.
Latest Patents
Kumning's latest patents include a method and apparatus for surface treatment using inorganic acid and ozone. This invention features a chamber designed to receive an article for treatment. A dispenser is utilized to apply a treatment liquid containing inorganic acid onto the article. The system includes a tank for storing the treatment liquid and an ozone generator that mixes ozone with the treatment liquid. Additionally, a cooler is incorporated to maintain the treatment liquid at a subambient temperature ranging from 3°C to less than 20°C. The apparatus also features a heater that raises the surface temperature of the article to at least 30°C higher than that of the treatment liquid during application. Another patent focuses on the improved removal of ion-implanted photoresist in a single wafer front-end wet processing station. This is achieved by dissolving gaseous ozone into relatively cool inorganic acid, dispensing the acid-ozone mixture onto a wafer, and rapidly heating the wafer's surface.
Career Highlights
Franz Kumning is currently employed at Lam Research AG, where he continues to develop innovative solutions in surface treatment technology. His work has significantly impacted the efficiency and effectiveness of industrial processes.
Collaborations
Kumning collaborates with talented coworkers, including Thomas Wirnsberger and Rainer Obweger, who contribute to the advancement of their projects.
Conclusion
Franz Kumning's contributions to surface treatment technology through his patents and work at Lam Research AG highlight his role as an influential inventor in the field. His innovative methods continue to shape the industry and improve manufacturing processes.