The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Dec. 16, 2011
Ulrich Tschinderle, Feistriz/Gail, AT;
Andreas Gleissner, Radenthein, AT;
Thomas Wirnsberger, Seeboden, AT;
Franz Kumnig, Lieserbrucke, AT;
Rainer Obweger, Lind im Drautel, AT;
Ulrich Tschinderle, Feistriz/Gail, AT;
Andreas Gleissner, Radenthein, AT;
Thomas Wirnsberger, Seeboden, AT;
Franz Kumnig, Lieserbrucke, AT;
Rainer Obweger, Lind im Drautel, AT;
Lam Research AG, Villach, AT;
Abstract
A device for processing wafer-shaped articles comprises a rotary chuck having a series of pins adapted to hold a wafer shaped article on the rotary chuck. Each of the pins comprises a cylindrical body and a projecting gripping portion formed integrally therewith. The cylindrical body and gripping portion are made from a ceramic material. The gripping portion comprises cylindrical surfaces having a common generatrix with surfaces of the cylindrical body.