Location History:
- Lieserbruecke, AT (2014)
- Lieserbrucke, AT (2013 - 2017)
- Villach, AT (2019 - 2021)
Company Filing History:
Years Active: 2013-2021
Title: **Franz Kumnig: Innovator in Wafer Processing Technology**
Introduction
Franz Kumnig, an esteemed inventor based in Lieserbrucke, Austria, has made significant contributions to the field of wafer processing technology. With a total of seven patents to his name, Kumnig is known for developing innovative methods and apparatuses that enhance the efficiency and effectiveness of wafer processing.
Latest Patents
Kumnig's latest invention revolves around a cutting-edge method and apparatus specifically designed for processing wafer-shaped articles. This sophisticated device includes a closed process chamber that ensures a gas-tight enclosure, optimizing the processing environment. A rotary chuck within the chamber holds the wafer-shaped article, while a strategically positioned heater heats the article from one side without making contact. Notably, the heater emits radiation with a maximum intensity within a wavelength range of 390 nm to 550 nm. Additionally, the apparatus features at least one liquid dispenser that applies a process liquid to the side of the wafer opposite the heater, enhancing the processing capabilities.
Career Highlights
Franz Kumnig has dedicated his career to innovation and excellence in semiconductor technology. His work at Lam Research AG, a leading company in the semiconductor equipment field, showcases his commitment to advancing wafer processing techniques. Kumnig’s expertise and patent contributions underline his central role in developing state-of-the-art technologies that serve the industry well.
Collaborations
Throughout his career, Franz Kumnig has collaborated with notable figures in the industry, including Rainer Obweger and Thomas Wirnsberger. These partnerships have fostered an environment of creativity and shared expertise, contributing to impactful advancements in wafer processing methods.
Conclusion
Franz Kumnig's inventive spirit and commitment to technological advancement have established him as a prominent figure in the field of wafer processing. With a focus on creating innovative solutions, Kumnig continues to influence the semiconductor industry through his patents and collaborative efforts, ensuring that he remains at the forefront of technological advancement.