Location History:
- Wishikasugai-gun, JP (2003)
- Aichi-Pref., JP (2004)
- Nishikasugai-gun, JP (2003 - 2008)
- Nagoya, JP (2003 - 2019)
Company Filing History:
17 out of 4,920 
2 out of 3,559 
2 out of 371 
Years Active: 2003-2019
Introduction
Osamu Oda, an accomplished inventor based in Nishikasugai-gun, Japan, has made significant contributions to the field of semiconductor technology. With a total of 19 patents to his name, Oda's work has focused on enhancing the efficiency and capabilities of radical generators and semiconductor production methods.
Latest Patents
Oda's latest innovations include two notable patents. The first, titled "Radical Generator," aims to produce radicals at a higher density, utilizing a system of a supply tube made of stainless steel (SUS) and a plasma-generating tube composed of pyrolytic boron nitride (PBN). The design incorporates both a first and a second cylindrical capacitively coupled plasma (CCP) electrode, optimizing the process for effective radical generation.
The second patent, "Apparatus and Method for Producing Group III Nitride Semiconductor Device," involves an intricate setup featuring a shower head electrode and a susceptor for substrate support. This production apparatus is designed to seamlessly supply both an organometallic gas containing Group III metals and nitrogen gas, ensuring the precise development of semiconductor wafers. Furthermore, the apparatus is engineered to optimize the distance between the shower head electrode and the susceptor, enhancing the overall manufacturing process.
Career Highlights
Oda has an impressive career, having worked for renowned organizations like NGK Insulators, Inc. and the Commissariat à l'énergie atomique (CEA). His expertise in design and innovation within these institutions has played a crucial role in advancing modern semiconductor technologies.
Collaborations
Throughout his professional journey, Osamu Oda has collaborated with notable individuals such as Mitsuhiro Tanaka and Tomohiko Shibata. These partnerships have fostered an environment of creativity and innovation, leading to the development of groundbreaking technologies in the semiconductor field.
Conclusion
Osamu Oda's contributions to the semiconductor industry through his numerous patents and collaborative efforts with fellow innovators have positioned him as a leader in his field. His work continues to pave the way for future advancements, reflecting the vital role of innovation in technology development.