The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2019
Filed:
Feb. 23, 2015
National University Corporation Nagoya University, Nagoya-shi, JP;
Nu System Incorporated, Nagoya-shi, JP;
NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, Nagoya-Shi, Aichi, JP;
NU-REI CO., LTD., Nagoya, JP;
Abstract
[Object] To provide a radical generator which can produce radicals at higher density. [Means for Solution] The radical generator includes a supply tubemade of SUS, a hollow cylindrical plasma-generating tubewhich is connected to the supply tubeand which is made of pyrolytic boron nitride (PBN). A first cylindrical CCP electrodeand a second cylindrical CCP electrodeare disposed outside the plasma-generating tube. A coilis provided so as to wind about the outer circumference of the plasma-generating tubeat the downstream end of the first CCP electrode. A thin connecting tubeextending from the bottom of the plasma-generating tubeis inserted into the supply tube