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For the Inventor, By the Inventor

San Diego, CA, United States of America

Oleh V Khodykin

This inventor holds 24 USPTO granted patents and 1 published patent application and 9 EPO patents, primarily in EUV Light Source Technology. Top assignee: Cymer, Inc.. Active years: 2004-2014.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Oleh V Khodykin. Retrieved from https://idiyas.com/inventor/oleh-v-khodykin

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 24 

% Patents Active = 54.2

 

Average Co-Inventor Count = 4.1

ph-index = 14

Forward Citations = 631(Granted Patents)


Company Filing History:

goldMedal24 out of 542 
 
Cymer, Inc.
 patents

Years Active: 2004-2014

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Areas of Expertise:
EUV Light Source
Drive Laser Systems
Plasma Sources
Debris Protection
Target Material Delivery
Collector Lifetime Improvements
Alternative Fuels
Discharge Produced Plasma
24 patents (USPTO):Explore Patents
1. 8686370 - EUV light source components and methods for producing, using and refurbishing same (2014-04-01),
2. 8461560 - LPP EUV light source drive laser system (2013-06-11),
3. 8314398 - EUV light source components and methods for producing, using and refurbishing same (2012-11-20),
4. 8035092 - Laser produced plasma EUV light source (2011-10-11),
5. 7960701 - EUV light source components and methods for producing, using and refurbishing same (2011-06-14),
6. 7928417 - LPP EUV light source drive laser system (2011-04-19),
7. 7872245 - Systems and methods for target material delivery in a laser produced plasma EUV light source (2011-01-18),
8. 7732793 - Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source (2010-06-08),
9. 7671349 - Laser produced plasma EUV light source (2010-03-02),
10. 7642533 - Extreme ultraviolet light source (2010-01-05),
11. 7589337 - LPP EUV plasma source material target delivery system (2009-09-15),
12. 7491954 - Drive laser delivery systems for EUV light source (2009-02-17),
13. 7482609 - LPP EUV light source drive laser system (2009-01-27),
14. 7465946 - Alternative fuels for EUV light source (2008-12-16),
15. 7439530 - LPP EUV light source drive laser system (2008-10-21),

Certainly! Here is the article about inventor Oleh V Khodykin:

Title: The Inventive Mind of Oleh V Khodykin

Introduction:

Oleh V Khodykin, a prolific inventor based in San Diego, CA, has made significant contributions to the field of EUV light source components and methods. With an impressive portfolio of 24 patents, Khodykin's innovative work has revolutionized the industry.

Latest Patents:

Khodykin's latest patents include groundbreaking methods for producing, using, and refurbishing EUV light source components. One such patent describes a method for in-situ monitoring of an EUV mirror to assess optical degradation, utilizing non-EUV light irradiation and sophisticated measurement techniques. Another patent showcases a method for preparing near-normal incidence EUV mirrors, involving precise surface treatments and multi-layer mirror coatings.

Career Highlights:

Currently affiliated with Cymer, Inc., Khodykin continues to drive innovation in the field of EUV technology. His expertise and dedication have led to the development of cutting-edge solutions that push the boundaries of what is possible in EUV light source design and fabrication.

Collaborations:

Throughout his career, Khodykin has collaborated with esteemed colleagues such as Igor Vladimirovich Fomenkov and Alexander Bykanov. Together, they have worked on various projects that have enriched the field of EUV technology and paved the way for future advancements.

Conclusion:

In conclusion, Oleh V Khodykin stands as a visionary inventor whose relentless pursuit of excellence has resulted in groundbreaking advancements in EUV light source components. His innovative spirit, coupled with his technical expertise, continues to inspire and shape the future of EUV technology.

Please let me know if you need any further information or assistance.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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