The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Apr. 14, 2011
Applicants:
Alexander I. Ershov, Escondido, CA (US);
Alexander N. Bykanov, San Diego, CA (US);
Oleh V. Khodykin, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Inventors:
Alexander I. Ershov, Escondido, CA (US);
Alexander N. Bykanov, San Diego, CA (US);
Oleh V. Khodykin, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Assignee:
Cymer, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/33 (2006.01); H05G 2/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus and method is disclosed which includes or employs an EUV light source comprising a laser device outputting a laser beam, a beam delivery system directing the laser beam to an irradiation site, and a material for interaction with the laser beam at the irradiation site to create an EUV light emitting plasma for use in processing substrates.