Hsinchu, Taiwan

Norman Chen


Average Co-Inventor Count = 5.4

ph-index = 3

Forward Citations = 45(Granted Patents)


Company Filing History:


Years Active: 2008-2024

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12 patents (USPTO):Explore Patents

Title: The Innovative Mind of Norman Chen

Introduction: Norman Chen, a notable inventor based in Hsinchu, Taiwan, has made significant contributions to the field of semiconductor technology. With an impressive portfolio of 12 patents, Chen continues to push the boundaries of innovation in the industry.

Latest Patents: Among his recent inventions, Chen has developed sophisticated mask cleaning technologies. His first patent describes an apparatus featuring a vacuum chamber with a reflective optical element specifically designed to reflect extreme ultra-violet (EUV) light. This apparatus includes a cleaning module that utilizes a mitigation gas to chemically react and eliminate contamination of the reflective optical element. Additionally, Chen's lithography system patent incorporates a streamlined process, connecting a load lock chamber that receives the mask directly to an exposure module, enhancing efficiency in exposing wafers to light through cleaned masks.

Career Highlights: Throughout his career, Norman Chen has been associated with prestigious companies, including Taiwan Semiconductor Manufacturing Company Limited and United Microelectronics Corporation. His work at these organizations has solidified his reputation as a leading innovator in semiconductor fabrication technology.

Collaborations: Collaboration is key in the realm of innovation, and Chen has worked alongside esteemed colleagues, including Vencent Chang and George Liu. These partnerships have undoubtedly contributed to the development of his cutting-edge inventions and the advancement of technology in his field.

Conclusion: Norman Chen exemplifies the spirit of innovation in the semiconductor industry, with a track record of successful patents and collaborations. His latest advancements in mask cleaning technology highlight his commitment to driving progress and enhancing the efficiency of semiconductor manufacturing processes. As he continues to innovate, the impact of his inventions will surely resonate throughout the industry for years to come.

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