The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Dec. 05, 2006
Applicants:
George Liu, Sin-Chu, TW;
Vencent Chang, Hsin-Chu, TW;
Chin-hsiang Lin, Hsin-Chu, TW;
Kuei Shun Chen, Hsin-Chu, TW;
Norman Chen, Hsinchu, TW;
Inventors:
George Liu, Sin-Chu, TW;
Vencent Chang, Hsin-Chu, TW;
Chin-Hsiang Lin, Hsin-Chu, TW;
Kuei Shun Chen, Hsin-Chu, TW;
Norman Chen, Hsinchu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device is fabricated to include one or more sets of calibration patterns used to measure line pitch and line focus.