Location History:
- Kanagawa-ken, JP (2002 - 2003)
- Kanagawa, JP (2007)
- Ohta-ku, JP (2009)
- Fujisawa, JP (2000 - 2010)
- Tokyo, JP (2002 - 2024)
Company Filing History:
27 out of 2,510 
2 out of 832,843 Years Active: 2000-2025
Title: Innovations of Nobuyuki Takada in Substrate Processing Technologies
Introduction
Nobuyuki Takada, a prolific inventor based in Fujisawa, Japan, holds an impressive portfolio of 28 patents primarily focusing on substrate processing technologies. His contributions significantly advance the methods and apparatuses used in polishing substrates, which are vital in various manufacturing processes, especially in the semiconductor industry.
Latest Patents
His latest inventions include a "Substrate Processing Apparatus and Substrate Processing Method." This apparatus features a table designed to support a substrate, a pad holder for a polishing pad, and an elevating mechanism to adjust the pad holder’s position. Notably, it incorporates at least three centering mechanisms to ensure precise alignment of the substrate on the table.
Another significant innovation is the "Polishing Head System and Polishing Apparatus," which allows for precise control over the film-thickness profile of workpieces such as wafers or panels. This system includes a polishing head with multiple piezoelectric elements capable of applying varying pressing forces, integrated with an operation controller that determines the appropriate voltages to optimize polishing efficiency.
Career Highlights
Nobuyuki Takada has made impactful strides in his field, particularly through his tenure at Ebara Corporation, where he applied his expertise to enhance substrate processing technologies. His inventions have contributed to the evolution of techniques that are essential in creating high-quality semiconductor devices.
Collaborations
Throughout his career, Takada has collaborated with notable individuals such as Tetsuji Togawa and Kunihiko Sakurai. Their combined efforts in research and development have yielded innovative solutions that meet the increasing demands of technology in the semiconductor and related sectors.
Conclusion
In conclusion, Nobuyuki Takada stands out as a significant figure in the realm of substrate processing innovation. With a robust list of patents and a track record of successful collaborations, his work not only enhances current technologies but also sets the stage for future advancements in the industry. His commitment to innovation continues to inspire many in the field.