The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2010
Filed:
Oct. 16, 2008
Tetsuji Togawa, Chigasaki, JP;
Ikutaro Noji, Yokohama, JP;
Keisuke Namiki, Fujisawa, JP;
Hozumi Yasuda, Fujisawa, JP;
Shunichiro Kojima, Yokohama, JP;
Kunihiko Sakurai, Yokohama, JP;
Nobuyuki Takada, Fujisawa, JP;
Osamu Nabeya, Chigasaki, JP;
Makoto Fukushima, Yokohama, JP;
Hideki Takayanagi, Tokyo, JP;
Tetsuji Togawa, Chigasaki, JP;
Ikutaro Noji, Yokohama, JP;
Keisuke Namiki, Fujisawa, JP;
Hozumi Yasuda, Fujisawa, JP;
Shunichiro Kojima, Yokohama, JP;
Kunihiko Sakurai, Yokohama, JP;
Nobuyuki Takada, Fujisawa, JP;
Osamu Nabeya, Chigasaki, JP;
Makoto Fukushima, Yokohama, JP;
Hideki Takayanagi, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present invention relates to a substrate holding apparatus for holding and pressing a substrate against a polishing surface. The substrate holding apparatus includes a top ring body for holding the substrate, an elastic pad for contacting the substrate, and a support member for supporting the elastic pad. The substrate holding apparatus further includes a contact member mounted on a lower surface of the support member and disposed in a space formed by the elastic pad and the support member. The contact member has an elastic membrane for contacting the elastic pad. A first pressure chamber is defined in the contact member, and a second pressure chamber is defined outside of the contact member. The substrate holding apparatus also includes a fluid source for independently supplying a fluid into, or creating a vacuum in, the first pressure chamber and the second pressure chamber.