Location History:
- Kanagawa-ken, JP (2002 - 2003)
- Kanagawa, JP (2001 - 2007)
- Tokyo, JP (2002 - 2009)
- Yokohama, JP (1997 - 2010)
Company Filing History:
35 out of 2,512 
1 out of 52,752 
2 out of 832,891 Years Active: 1997-2010
Title: Innovations by Kunihiko Sakurai: A Leader in Substrate Holding Apparatus Patents
Introduction: Kunihiko Sakurai, an accomplished inventor based in Tokyo, Japan, has made significant contributions to the field of substrate holding apparatuses. With an impressive portfolio of 37 patents, his work primarily focuses on innovative technologies that enhance the polishing of substrates, particularly semiconductor wafers.
Latest Patents: Among his latest patents, Sakurai has developed groundbreaking inventions such as the "Substrate Holding Apparatus." This device is designed to hold and press a substrate against a polishing surface, comprising a top ring body, elastic pad, and support member. The apparatus features a contact member with an elastic membrane that allows for precise control over pressure applied to the substrate, facilitated by independent fluid supply systems in designated pressure chambers.
Another noteworthy invention is the "Substrate Holding Apparatus and Polishing Apparatus," which further refines the process of polishing substrates to achieve a flat finish. This innovation incorporates a vertically movable member within the top ring body, alongside an abutment member with an elastic membrane. The design prioritizes flexibility and precision in contacting substrates, demonstrating Sakurai's commitment to excellence in semiconductor processing technologies.
Career Highlights: Throughout his career, Kunihiko Sakurai has worked with renowned companies, including the Ebara Corporation. His expertise and dedication to innovation have paved the way for advancements in substrate handling and polishing technologies, significantly impacting the semiconductor industry.
Collaborations: Sakurai has collaborated with talented individuals such as Tetsuji Togawa and Nobuyuki Takada. These partnerships have fostered a creative environment that has led to the successful development of numerous patents focused on refining substrate handling methods.
Conclusion: Kunihiko Sakurai's contributions to the invention of substrate holding apparatuses showcase his exemplary skills as an inventor. With 37 patents to his name, his work continues to influence the semiconductor industry and push the boundaries of technological advancement. As he progresses in his career, Sakurai's innovative spirit remains a driving force towards excellence in substrate processing technologies.