Location History:
- Aalen, DE (2003 - 2005)
- Hüttlingen, DE (2006 - 2010)
- Huettingen, DE (2008 - 2014)
- Huettlingen, DE (2009 - 2016)
Company Filing History:
7 out of 461 
6 out of 1,405 
2 out of 702 
Years Active: 2003-2016
Title: **Nils Dieckmann: Innovator in Microlithography**
Introduction
Nils Dieckmann, an accomplished inventor based in Huettlingen, Germany, has made significant contributions to the field of microlithography through his innovative optical systems. With a remarkable total of 16 patents to his name, Dieckmann exemplifies the spirit of invention and the pursuit of advancements in technology.
Latest Patents
Among his latest patents, Dieckmann has developed an "Illumination system or projection objective of a microlithographic projection exposure apparatus." This invention focuses on an optical system that incorporates a polarization-influencing optical arrangement, allowing for enhanced flexibility in achieving a desired polarization distribution. Additionally, he has created an "Illumination system of a microlithographic projection exposure apparatus," featuring at least one transmission filter that exhibits variable transmittance at different positions. This filter is strategically situated between a pupil plane and a field plane, optimizing ellipticity correction while preserving telecentricity and irradiance uniformity.
Career Highlights
Throughout his career, Nils Dieckmann has been affiliated with prominent companies in the world of optics, including Carl Zeiss SMT AG and Carl Zeiss SMT GmbH. These associations have provided him with a platform to hone his skills and bring groundbreaking innovations to the industry.
Collaborations
Dieckmann has collaborated with notable colleagues, such as Damian Fiolka and Toralf Gruner, further amplifying his contributions to microlithography and optical systems. These partnerships reflect the collaborative spirit within research and development, propelling the industry forward.
Conclusion
Nils Dieckmann continues to be a pivotal figure in the field of optical innovations, with his work transforming the landscape of microlithographic projection exposure apparatuses. Through his extensive patent portfolio and collaborative efforts, Dieckmann's legacy as an inventor is cemented, inspiring future generations in the pursuit of excellence in technology and innovation.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.